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7 Axis Spot Weld Machine
  • +/- 12.7 micron repeatability
  • +/- 12.7 micron Accuracy
  • +/- 5 micron Flatness
  • +/- 8.5 micron Straightness
2 Axis Precision Luge Stages
250 & 150mm Width
XY Motion System
for High Vacuum Applicati
on
  • Semiconductor, 300mm
    Wafer Metrology with E beam
  • Customized Ultra 400mm x 300mm
  • +/- 0.5 micron repeatability
  • +/- 3 micron Accuracy
  • +/- 2 micron Flatness/Straightness
  • +/- 5 arc sec Pitch +/- 2 arc sec Yaw
  • Vacuum 10^-7 Torr, 100mGauss,
    90 Kg moving weight
  • 3 U amplifier box, ACS Tech
    80 Spii Plus PCI
Motion Platform for the
Life Sciences
  • High throughput screening
  • Using Luge LM, XYZ travel
    1,200 x 600 x90mm
  • 500mm/sec velocity
  • 0.6g acceleration
  • +/- 25 micron accuracy
  • +/- 5 micron repeatability
  • 3 U amplifier Box
Stealth "Fizzle" Cutaway

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Call 516.484.5353 or 800.305.4555, 27 Seaview Blvd., Port Washington, NY 11050 USA www.parkermotion.com, 707.584.7558 or 800.358.9068
Copyright © 2005 Parker Hannifin Corp.