XY Motion System
for High Vacuum Application
- Semiconductor, 300mm
Wafer Metrology with E beam
- Customized Ultra 400mm x 300mm
- +/- 0.5 micron repeatability
- +/- 3 micron Accuracy
- +/- 2 micron Flatness/Straightness
- +/- 5 arc sec Pitch +/- 2 arc sec Yaw
- Vacuum 10^-7 Torr, 100mGauss,
90 Kg moving weight
- 3 U amplifier box, ACS Tech
80 Spii Plus PCI
| Motion Platform for the
Life Sciences
- High throughput screening
- Using Luge LM, XYZ travel
1,200 x 600 x90mm
- 500mm/sec velocity
- 0.6g acceleration
- +/- 25 micron accuracy
- +/- 5 micron repeatability
- 3 U amplifier Box
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