Linear Motor Driven Ultra Stages
Linear Motor Ultra Stages can achieve sub-micron accuracy with position repeatability of + 1 encoder count. Featuring Parker Bayside’s patented AutoFlex Preload, Linear Motor Ultra Stages provide exceptional smoothness of motion for constant velocity requirements in scanning applications. The AutoFlex preload provides a unique thermal compensation method, eliminating any effects of expansion / contraction on bearing performance. The brushless linear motor is mounted inverted, with the ironless coil attached to the stationary base, eliminating moving wires.
Screw-Driven Ultra Stages
Traditional Ultra Stages are provided with either a ball screw or lead screw mounted alongside the stage. This stage configuration allows easy mounting of any step or servo motor with a flexible coupling. The ball screw version provides high speed and high force for dynamic move-and-settle applications. The lead screw version provides exceptional smoothness for slow speed scanning. Both the lead screw and ball screw models are available with linear encoders, providing high positional accuracy and repeatability.
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